Semiconductor device including a trench structure

ABSTRACT

A semiconductor device having first through third layers. The first layer has a first conductivity type. The second layer has a second conductivity type different from the first conductivity type. The third layer has a first portion having the second conductivity type and a second portion having the first conductivity type. A trench structure is located in the first portion and is completely surrounded by the first portion in an area extending from a first surface of the third layer to a second surface of the third layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a division of U.S. Ser. No. 14/688,640, filed Apr.16, 2015, which is a division of U.S. Ser. No. 12/716,427 filed Mar. 3,2010 (now U.S. Pat. No. 9,035,434), and claims the benefit of priorityunder 35 U.S.C. § 119 from Japanese Patent Application No. 2009-135077filed Jun. 4, 2009 the entire contents of each of which are incorporatedherein by reference.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention relates to a semiconductor device, andparticularly to a power semiconductor device.

Description of the Background Art

A power semiconductor device includes a high breakdown voltage powermodule which can withstand a voltage of, for example, 600 V or higher.Such a power module may have a diode formed thereon.

For example, Japanese Patent Laying-Open No. 02-066977 discloses a diodehaving a pn junction formed by an n⁻ layer adjacent to a p layer, inwhich an n⁺ region and a p⁺ region are located on the surface of the n⁻layer opposite to the p⁺ layer. In addition, an n buffer layer islocated between the n⁻ layer and the region including the n⁺ region andthe p⁺ region. This document discloses that the p⁺ region has an effectof reducing a reverse recovery current of the diode and also shorteningthe reverse recovery time. It also discloses that the n buffer layer canprevent the depletion layer from extending to the n⁻ layer duringapplication of the reverse voltage, which allows a reduction inthickness of the n⁻ layer, with the result that the reverse recoverycharacteristics of the high breakdown voltage diode can be improved.

Furthermore, for example, Japanese Patent Laying-Open No. 08-172205discloses a diode including an n⁻ semiconductor layer formed on one mainsurface of an n-type semiconductor substrate; an n⁺ cathode regionformed on the surface layer of the n⁻ semiconductor layer; a trenchextending from the surface of the n⁺ cathode region through the n⁻semiconductor layer to the n-type semiconductor substrate; a gateelectrode filling the trench with a gate oxide film interposedtherebetween; an insulation film formed on the gate electrode; a cathodeelectrode in contact with the surface of the n⁺ cathode regioninterposed between the trenches; a p⁺ anode region formed on a part ofthe surface layer of the n-type semiconductor substrate; and an anodeelectrode in contact with the p⁺ anode region. According to thisdocument, as the gate electrode is applied with a voltage which isnegative with respect to the cathode electrode, a breakdown of the diodeand burning of the switching transformer can be prevented when anovercurrent flows through the diode.

With regard to the power diode, it is difficult to solve the problemsinvolved in both of the tasks of decreasing a forward voltage drop(V_(F)) and suppressing the oscillation at the time of recovery (reverserecovery). For example, Japanese Patent Laying-Open No. 02-066977 asdescribed above merely discloses that the recovery characteristics canbe improved by providing a p⁺ region, but fails to disclose how toconfigure the p⁺ region for allowing the above-described problems to besolved in a balanced manner.

Furthermore, it may be desirable to especially decrease V_(F) dependingon the use of the power diode. However, according to the techniquedisclosed in Japanese Patent Laying-Open No. 08-172205 described above,the gate electrode is applied with a voltage that is negative withrespect to the cathode electrode, which causes a problem of an increasein V_(F).

SUMMARY OF THE INVENTION

The present invention has been made in light of the above-describedproblems, and an object of the present invention is to provide asemiconductor device capable of decreasing V_(F) and suppressing theoscillation at the time of recovery. Furthermore, another object of thepresent invention is to provide a semiconductor device capable ofparticularly decreasing V_(F).

A semiconductor device according to one aspect of the present inventionincludes first and second electrodes, and first to fourth layers. Thefirst layer is located on the first electrode and has a firstconductivity type. The second layer is located on the first layer andhas a second conductivity type different from the first conductivitytype. The third layer is located on the second layer. The secondelectrode is located on the third layer. The fourth layer is locatedbetween the second layer and the third layer, and has the secondconductivity type. The third layer includes first and second portions.The first portion has the second conductivity type and has a peak valueof an impurity concentration higher than the peak value of the impurityconcentration in the second layer. The second portion has the firstconductivity type. An area of the second portion accounts for not lessthan 20% and not more than 95% of a total area of the first and thesecond portions.

A semiconductor device according to another aspect of the presentinvention includes first and second electrodes, first to third layers,and a trench structure. The first layer is located on the firstelectrode and has a first conductivity type. The second layer is locatedon the first layer and has a second conductivity type different from thefirst conductivity type. The third layer is located on the second layerand has a first portion. The first portion has the second conductivitytype and has a peak value of an impurity concentration higher than thepeak value of the impurity concentration in the second layer. The secondelectrode is located on the third layer. The trench structure is locatedin the first portion and applied with an electric potential which ispositive with respect to an electric potential of the second electrode.

The semiconductor device according to an aspect of the present inventionallows a decrease in V_(F) of a diode and also allows suppression of theoscillation at the time of recovery.

The semiconductor device according to another aspect of the presentinvention allows a decrease in V_(F) of the diode.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view schematically showing the configurationof a diode as a semiconductor device according to the first embodimentof the present invention.

FIG. 2 is a graph schematically showing impurity profiles C_(A) andC_(B) along arrows D_(A) and D_(B), respectively, in FIG. 1.

FIG. 3 is a diagram showing a circuit used for each simulation for thediode in FIG. 1 and a comparative example thereof.

FIG. 4 is a graph showing an example of the simulations for the recoverycharacteristic waveform with regard to each diode in FIG. 1 and in thecomparative example.

FIG. 5 is a graph showing an example of a relationship J_(A) 1 between avoltage V_(AK) and a current density J_(A) in the forward direction ofthe diode in FIG. 1, and an example of a relationship J_(A) 0 between avoltage V_(AK) and a current density J_(A) in the forward direction ofthe diode in the comparative example.

FIG. 6 is a diagram showing an example of the cross point at whichrelationships between voltage V_(AK) and current density J_(A) crosseach other in accordance with the temperature change.

FIG. 7 is a graph schematically showing an example of a relationshipJ_(R) 1 between a voltage V_(RA) and a current density J_(R) in thereverse direction of the diode in FIG. 1, and an example of arelationship J_(R) 0 between voltage V_(RA) and current density J_(R) inthe reverse direction of the diode in the comparative example.

FIG. 8 is a graph schematically showing an electric field intensity Eand a carrier concentration CC at a point P_(B) in FIG. 4.

FIG. 9 is a graph showing an example of the relationship between each ofa surge voltage V_(surge) and V_(F) at the rated current density in thediode in FIG. 1 and the ratio of a width W_(P) of a p layer to a widthW_(C) of a cathode portion.

FIG. 10 is a graph showing an example of the recovery characteristics ofthe diode in the case where width W_(P) of the p layer accounts for 0%of width W_(C) of the cathode portion in FIG. 1.

FIG. 11 is a graph showing an example of the recovery characteristics ofthe diode in the case where width W_(P) of the p layer accounts for 10%of width W_(C) of the cathode portion in FIG. 1.

FIG. 12 is a graph showing an example of the recovery characteristics ofthe diode in the case where width W_(P) of the p layer accounts for 20%of width W_(C) of the cathode portion in FIG. 1.

FIG. 13 is a graph showing an example of the recovery characteristics ofthe diode in the case where width W_(P) of the p layer accounts for 50%of width W_(C) of the cathode portion in FIG. 1.

FIG. 14 is a graph showing an example of the relationship between eachof a maximum reverse voltage V_(RRM), V_(F) at the rated current densityand surge voltage V_(surge) in the diode in FIG. 1, and a ratio C₁/C₃ ofpeak values C₁ and C₃ of the impurity concentration in FIG. 2.

FIG. 15 is a graph showing an example of a characteristic curve E_(REC)1 illustrating trade-off characteristics between a recovery loss E_(REC)and V_(F) at the rated current density of the diode in FIG. 1 in thecase where a peak value C₂ is higher than C₁ in FIG. 2; an example of acharacteristic curve E_(REC) 2 illustrating the relationship betweenrecovery loss E_(REC) and V_(F) at the rated current density of thediode in FIG. 1 in the case where peak value C₁ is equal to peak valueC₂ in FIG. 2; and an example of a characteristic curve E_(REC) 0illustrating the relationship between recovery loss E_(REC) and V_(F) atthe rated current density of the diode in the comparative example.

FIG. 16 is a graph showing an example of the relationship between V_(F)at the rated current density in the diode in FIG. 1 and a ratio C₂/C₁ ofpeak values C₁ and C₂ of the impurity concentration in FIG. 2.

FIG. 17 is a graph showing an example of a hole concentration CCh1 andan electron concentration CCe1 along an arrow D_(A) (FIG. 1) in the ONstate in the case where peak value C₂ is higher than C₁ in FIG. 2; andan example of a hole concentration CCh2 and an electron concentrationCCe2 along arrow D_(A) (FIG. 1) in the ON state in the case where peakvalue C₁ is equal to C₂ in FIG. 2.

FIG. 18 is a cross-sectional view schematically showing theconfiguration of the diode as a semiconductor device in the secondembodiment of the present invention.

FIG. 19 is a cross-sectional view schematically showing theconfiguration of a modification of the diode in FIG. 18.

FIG. 20 is a cross-sectional view schematically showing theconfiguration of the diode as a semiconductor device in the thirdembodiment of the present invention.

FIG. 21 is a cross-sectional view schematically showing theconfiguration of the first modification of the diode in FIG. 20.

FIG. 22 is a cross-sectional view schematically showing theconfiguration of the second modification of the diode in FIG. 20.

FIG. 23 is a graph showing an example of carrier concentrations CC3 andCC0 in the ON state in each diode in FIG. 20 and in the comparativeexample.

FIG. 24 is a graph showing an example of a relationship J_(A) 3 betweenvoltage V_(AK) and current density J_(A) in the forward direction of thediode in FIG. 20; and an example of a relationship J_(A) 0 betweenvoltage V_(AK) and current density J_(A) in the forward direction of thediode in the comparative example.

FIG. 25 is a graph showing an example of the relationship between atrench depth y in FIG. 20 and V_(F) at the rated current density.

FIG. 26 is a cross-sectional view showing the configuration of the diodein the comparative example.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

An embodiment of the present invention will be hereinafter describedwith reference to the drawings.

First Embodiment

Referring to FIG. 1, a diode as a semiconductor device according to thepresent embodiment includes an anode electrode 5 (the first electrode),a p layer 3 (the first layer), an n⁻ drift layer 1 (the second layer),an n layer 15 (the fourth layer), a cathode layer CLa (the third layer),and a cathode electrode 4 (the second electrode). For example, p layer3, n⁻ drift layer 1, n layer 15, and cathode layer CLa are, for example,made of Si to which conductive impurities are added.

P layer 3 is located on (in the figure, immediately below) anodeelectrode 5 and has a p-type (the first conductivity type).

N⁻ drift layer 1 is located on (in the figure, immediately below) player 3 to have a thickness of a dimension t3. Furthermore, n⁻ driftlayer 1 has a conductivity type different from a p-type, that is, ann-type (the second conductivity type).

Cathode layer CLa is located on (in the figure, below) n⁻ drift layer 1with n layer 15 interposed therebetween. Cathode layer CLa is in arectangular shape having a width W_(c) in plan view taken at rightangles to the width direction. Cathode layer CLa also includes an n⁺region 2 (the first portion) having an n-type and a p region 16 (thesecond portion) having a p-type.

Furthermore, in the present embodiment, n⁺ region 2 and p region 16 areeach in a rectangular shape having a width W_(n) and a width W_(p),respectively, in plan view. Cathode layer CLa, n⁺ region 2 and p region16 are identical in length (at right angles to the width) in plan view.Width W_(c), width W_(n) and width W_(p) establish the relationship ofW_(c)=W_(n)+W_(p). Consequently, the ratio of the area of n⁺ region 2 tothe area of p region 16 in plan view is W_(n):W_(p). Furthermore,cathode layer CLa is formed such that the following expression issatisfied.0.2≤W _(p) /W _(c)≤0.95

Accordingly, the area of p region 16 accounts for not less than 20% andnot more than 95% of the total area of n⁺ region 2 and p region 16 on nlayer 15.

It is to be noted that a dimension t1 in the figure is equivalent toeach thickness of n⁺ region 2 and p region 16 which is, for example, 0.2to 5 μm. Furthermore, a dimension t_(sub) is equivalent to the entirethickness of the semiconductor layer.

N layer 15 is located between n⁻ drift layer 1 and cathode layer CLa,and has an n-type (the second conductivity type). Furthermore, n layer15 has a thickness of a dimension obtained by subtracting dimension t1from a dimension t2 in the figure, which is 1 to 50 μm, for example. Nlayer 15 has an n region 15 n (the third portion) located on n⁺ region 2and an n region 15 p (the fourth portion) located on p region 16. Inaddition, n layer 15 substantially contains only the n-type conductiveimpurities but does not substantially contain the p-type conductiveimpurities.

Cathode electrode 4 is located on cathode layer CLa.

Referring to FIG. 2, impurity profiles C_(A) and C_(B) each show adistribution of the impurity concentration in depths D_(A) and D_(B),respectively (FIG. 1). N⁺ region 2 has a peak value C₄ of an impurityconcentration higher than a peak value C₀ of the impurity concentrationin n⁻ drift layer 1, and also higher than a peak value C₃ of theimpurity concentration in p region 16. The ratio of a peak value C₁ ofthe impurity concentration in n region 15 p to peak value C₃ of theimpurity concentration in p region 16 is not less than 0.001 and notmore than 0.1. N layer 15 has peak values C₁ and C₂ of the impurityconcentration higher than peak value C₀ of the impurity concentration inn⁻ drift layer 1 and lower than peak value C₄ of the impurityconcentration in n⁺ region 2 of cathode layer CLa.

For example, the surface concentration of n⁺ region 2 is 1×10¹⁷ to1×10²¹ cm⁻³, and the surface concentration of p region 16 is 1×10¹⁶ to1×10²¹ cm⁻³. Furthermore, peak values C₁ and C₂ of the impurityconcentration in n layer 15 each are 1×10¹⁶ to 1×10²⁰ cm⁻³.

In the present embodiment, n layer 15 substantially contains only then-type conductive impurities, but does not substantially contain thep-type conductive impurities. Thus, impurity profile C_(B) within asection between dimensions t1 and t2 in FIG. 2 shows the concentrationof the n-type conductive impurities. In the case where n region 15 palso substantially contains the p-type conductive impurities in additionto the n-type conductive impurities, the impurity concentration means aneffective impurity concentration, that is, a concentration differencebetween the p-type and n-type conductive impurities.

The diode according to a comparative example will then be described.

Referring to FIG. 26, the diode in the comparative example has a cathodelayer CLb including n⁺ region 2, in place of cathode layer CLa accordingto the present embodiment. N layer 15 is located immediately on cathodelayer CLb. The following two problems may be caused in this comparativeexample.

As to the first problem, during the recovery operation, it is morelikely that the hole concentration remaining on the side close to n⁺region 2 and n layer 15 decreases and a depletion layer extends. Theoscillation phenomenon occurs at the instant when this depletion layerreaches n layer 15. Consequently, the safe operating area (SOA)tolerance and the recovery tolerance are reduced.

As to the second problem, in order to address the oscillation phenomenonduring recovery, it is necessary to delay extension of the depletionlayer from the junction of p layer 3/n ⁻ drift layer 1 serving as a mainjunction toward the cathode side. This requires an increase in dimensiont3 corresponding to the thickness of the n⁻ drift layer in the presentcomparative example. As a result, it becomes difficult to improve thetrade-off characteristics between a decrease in V_(F) and a recoveryloss (E_(REC)).

In the comparative example, dimension t3 is set to be relatively shortwhich causes the above-described first problem, and dimension t3 is setto be relatively long which causes the above-described second problem.Thus, in the present comparative example, it is difficult to achieve animprovement of the trade-off characteristics between a decrease in V_(F)and recovery loss, and also achieve an improvement of the SOA toleranceby suppression of the oscillation phenomenon and the like.

In contrast, the present embodiment allows a decrease in V_(F) and alsoallows an improvement of the SOA tolerance while ensuring a highbreakdown voltage. In other words, it becomes possible to decreaseV_(F), improve the maximum reverse voltage, and suppress the oscillationat the time of recovery.

Referring to FIG. 3, in order to verify the above-described operationsand effects, simulations were performed for the circuit including adiode rated at 3300V class as an example of the semiconductor deviceaccording to the present embodiment. This circuit includes a diode DD, atransistor TR corresponding to an IGBT (Insulated Gate BipolarTransistor), coils LM, LAK and LCE, resistances RL, RAK, RCE, and RG,power supplies VC and VG, and a current source ION. Coil LM is providedfor a parasitic inductance, resistance RG is provided for the gateresistance of the IGBT, and power supply VG is provided for the gatevoltage of the IGBT. Furthermore, coils LAK and LCE are provided for awiring impedance for providing matching between the measured results andthe simulation results. Resistances RL, RAK and RCE are provided for awiring-related resistance for providing matching between the measuredresults and the simulation results. The simulation results will behereinafter described.

Referring to FIG. 4, with regard to the present example and thecomparative example, simulations were performed for the recoverycharacteristic waveform, that is, changes over time of a voltage V_(AK)and a current density J_(A) during the recovery. The figure shows avoltage V_(AK) 1 and a current density J_(A) 1 in the case of the diodein the present example (FIG. 1), and shows a voltage V_(AK) 0 and acurrent density J_(A) 0 in the case of the diode in the comparativeexample (FIG. 26). In the present example, the oscillation occurringduring the recovery can be suppressed as compared to the case in thecomparative example. Accordingly, a surge voltage V_(surge)corresponding to a peak voltage of voltage V_(AK) which is not less than5000V in the comparative example can be suppressed approximately to3000V in the present example.

It is to be noted that the simulation conditions are set such that coilLM is 12 μm, power supply VC is 1700V, a rated current density J_(A)R is90 A/cm², and a current J_(F) in the forward direction is J_(A)R/10, anda temperature is 298K.

Referring to FIG. 5, simulations were performed for the characteristicsof current density J_(A)−voltage V_(AK). The figure shows a relationshipJ_(A) 1 in the case of the diode in the example (FIG. 1) according tothe present embodiment, and a relationship J_(A) 0 in the case of thediode in the comparative example (FIG. 26). Furthermore, V_(F) showsvoltage V_(AK) at the time when current density J_(A) corresponds torated current density J_(A)R=90 A/cm². According to the present example,V_(F) can be decreased as compared to the case in the comparativeexample.

In addition, the characteristics of current density J_(A)−voltage V_(AK)generally vary with temperature. The characteristics of current densityJ_(A)−voltage V_(AK) at temperatures of 25 C.° and 12 C.° are as shownin FIG. 6, for example. It is to be noted that the point at which thecharacteristic curves cross each other is assumed to be a cross pointCP.

Referring to FIG. 7, simulations were performed for the characteristicsin the reverse direction (current density J_(R)−voltage V_(RA)). Thefigure shows a relationship J_(R) 1 in the case of the diode in thepresent example (FIG. 1) and a relationship J_(R) 0 in the case of thediode in the comparative example (FIG. 26). Furthermore, a maximumreverse voltage V_(RRM) is assumed to be a voltage V_(RA) at the timewhen current density J_(R)=1×10⁻² A/cm². According to the presentexample, maximum reverse voltage V_(RRM) can be increased as compared tothe case in the comparative example.

In the case where n layer 15 substantially contains p-type conductiveimpurities, maximum reverse voltage V_(RRM) is decreased. Conversely, inthe case where n layer 15 substantially contains only the n-typeconductive impurities, maximum reverse voltage V_(RRM) is increased.

Mainly referring to FIG. 8, the distributions of an electric fieldintensity E and a carrier concentration CC in the depth direction of thedevice at a point P_(B) (FIG. 4) were analyzed by simulation. In thefigure, the horizontal axis corresponds to a depth along an arrow D_(A)(FIG. 1). Furthermore, the figure shows a hole concentration CCh1, anelectron concentration CCe1 and an electric field intensity E1 in thecase of the diode in the present example (FIG. 1), and also shows a holeconcentration CCh0, an electron concentration CCe0 and an electric fieldintensity E0 in the case of the diode in the comparative example (FIG.26). According to the configuration in the present example (FIG. 1),when holes are injected from p region 16 located close to the cathodeside during the recovery phenomenon, hole concentration CCh1 on thecathode side is improved as compared to the case of hole concentrationCCh0 in the comparative example. Consequently, as indicated by an arrowRE in the figure, the electric-field relaxation phenomenon occurs inwhich electric field intensity E on the cathode side is reduced.

Mainly referring to FIGS. 9-13, in order to examine the correlation(FIG. 9) of each of V_(F) (FIG. 5) and surge voltage V_(surge) (FIG. 4)with a width ratio W_(p)/W_(c) (FIG. 1), simulations (for example, FIGS.10-13) were performed for the recovery characteristic waveform (changesover time of a current I_(A) and voltage V_(AK) during recovery) undervarious ratios W_(p)/W_(c).

As a result, in the case where width W_(p) accounts for 20% or more ofwidth W_(e), that is, in the case where the area of p region 16 accountsfor 20% or more of the total area of n⁺ region 2 and p region 16 (FIG.1), the oscillation is suppressed during the recovery, which allowssurge voltage V_(surge) to be remarkably suppressed to 3300V or lowerthat is a rated voltage.

Furthermore, when width W_(p) exceeds 95% of width W_(c), V_(F)increases rapidly which may affect the operation of the diode.Conversely, as width W_(p) is set to account for 95% or less of widthW_(c), that is, as the area of p region 16 is set to account for 95% orless of the total area of n⁺ region 2 and p region 16, V_(F) isremarkably suppressed.

Mainly referring to FIG. 14, the correlation of each of maximum reversevoltage V_(RRM), V_(F) and surge voltage V_(surge) with the ratio C₁/C₃of peak values C₁ and C₃ (FIG. 2) of the impurity concentration wasexamined by simulation. In light of the results shown in FIG. 9, widthW_(p) was set to account for 20% of width W_(c) such that theoscillation during recovery might be suppressed.

The results of the simulations show that ratio C₁/C₃ is set to be 1×10⁻¹or lower, to thereby allow surge voltage V_(surge) to be remarkablysuppressed to 3300V or lower which corresponds to a rated voltage.

The results also show that ratio C₁/C₃ is set to be 1×10⁻³ or more, tothereby allow maximum reverse voltage V_(RRM) (FIG. 7) to be maintainedat 3300V or more which corresponds to a rated voltage. It is consideredthat this is because ratio C₁/C₃ is set to be 1×10⁻³ or more, whichallows suppression of extension of the depletion layer from the junctionof p layer 3/n ⁻ drift layer 1 serving as a main junction toward thecathode side.

Referring to FIG. 15, simulations were performed to examine thetrade-off characteristics between recovery loss E_(REC) (mJ/A·pulse) andV_(F) (V). The figure shows a characteristic curve E_(REC) 1 in the casewhere peak values C₁ and C₂ of the impurity concentration (FIG. 2)satisfy the relation of C₂<C₁, and a characteristic curve E_(REC) 2 inthe case where peak values C₁ and C₂ satisfy the relation of C₂=C₁. Thefigure also shows a characteristic curve E_(REC) 0 in the case of thediode in the comparative example (FIG. 26).

The results show that, as compared to the configuration (characteristiccurve E_(REC) 0) in the comparative example (FIG. 26), the configuration(characteristic curves E_(REC) 1 and E_(REC) 2) in the present example(FIG. 1) serves to achieve an improvement in the trade-off relationshipbetween recovery loss E_(REC) and V_(F), and also achieve a furtherimprovement particularly in the case where peak values C₁ and C₂ of theimpurity concentration satisfy the relation of C₂>C₁. In other words, itis found that the above-described trade-off relationship can be improvedwhile maintaining dimension t3 (FIGS. 1 and 26) in terms of the SOA,that is, without the need to decrease dimension t3.

It is to be noted that V_(F) decreases with an increase in ratio C₂/C₁of the peak values of the impurity concentration, as shown in FIG. 16.

FIG. 17 shows the simulation results of carrier concentration CC in theON state, that is, in the case where current density J_(A) is equal torated current density J_(A)R (FIG. 5). In the figure, the horizontalaxis corresponds to a depth along arrow D_(A) (FIG. 1). Furthermore, thefigure shows hole concentration CCh1 and electron concentration CCe1 inthe case where peak values C₁ and C₂ of the impurity concentrationsatisfy the relation of C₂>C₁, and also shows a hole concentration CCh2and an electron concentration CCe2 in the case where peak values C₁ andC₂ of the impurity concentration satisfy the relation of C₂=C₁.

The results described above show that, when peak values C₁ and C₂satisfy the relation of C₂>C₁, the carrier concentration near thecathode is increased in the ON state. It is considered that thisincrease in carrier concentration causes a decrease in V_(F) (FIG. 16),with the result that the trade-off relationship between recovery lossE_(REC) and V_(F) (FIG. 15) is improved.

According to the present embodiment, V_(F) is decreased, the oscillationat the time of recovery is suppressed, and maximum reverse voltageV_(RRM) is improved, which will be hereinafter described in detail.

According to the diode structure (FIG. 1) in the present embodiment,when holes are injected from p region 16 during the recovery phenomenon,hole concentration CCh1 (FIG. 8) on the cathode side is increased abovehole concentration CCh0 in the case of the diode structure (FIG. 26)according to the comparative example. Consequently, in the presentembodiment, the electric field on the cathode side is relaxed asindicated by arrow RE (FIG. 8) during the recovery, as compared to thecase in the comparative example, which allows suppression of extensionof the depletion layer from the junction of p layer 3/n ⁻ drift layer 1serving as a main junction toward the cathode side. Accordingly, theoscillation phenomenon during the recovery is suppressed as shown inFIG. 4, resulting in improvement of the SOA tolerance of the diode.Thus, according to the diode of the present embodiment (FIG. 1), theoscillation can be suppressed by injecting holes from p region 16 duringthe recovery phenomenon to thereby cause electric-field relaxation (tosuppress extension of the depletion layer). Consequently, thickness t3of n⁻ drift layer 1 can be reduced, and thus, the trade-offcharacteristics between recovery loss E_(REC) and V_(F) can be improvedas shown in FIG. 15.

The proportion of the area of p region 16 occupying the area of cathodelayer CLa in FIG. 1 (ratio W_(p)/W_(c) between widths W_(p) and W_(c) inFIG. 1) serves as an important parameter for facilitating hole injectionfrom the cathode side during the recovery operation. In other words, asshown in FIG. 4, V_(F) and surge voltage V_(surge) greatly varysignificantly depending on this parameter. According to the presentembodiment, as the following expression (1) is satisfied, an excellentoperation of the diode can be ensured while suppressing the oscillationat the time of recovery.20%≤ratio W _(p) /W _(c)≤95%  (1)

In the above expression (1), the upper limit value, 95%, represents acondition for sufficiently decreasing V_(F) (FIG. 9) for practicalapplication. Furthermore, the lower limit value, 20%, represents acondition for remarkably suppressing a waveform surge in the V_(AK)waveform (FIGS. 10 to 13), that is, V_(surge) (FIG. 9), to not more thanthe value of the breakdown voltage class (3300V in the above-describedsimulations). As expression (1) is satisfied in this way, V_(F) isdecreased and the oscillation during recovery is suppressed.

As described above, ratio C₁/C₃ (FIG. 14) of peak values C₁ and C₃ (FIG.2) of the impurity concentration satisfies the following expression (2)while decreasing V_(F) and suppressing the oscillation at the time ofrecovery, which allows maximum reverse voltage V_(RRM) to be improved.0.001≤ratio C ₁ /C ₃≤0.1  (2)

In the above expression (2), the upper limit value, 0.1, represents acondition for suppressing V_(surge) to not more than the value of thebreakdown voltage class (3300V in the above-described simulations) byinjecting sufficient holes from p region 16 of cathode layer CLa.Furthermore, the lower limit value, 0.001, represents a condition forpreventing a decrease in maximum reverse voltage V_(RRM) resulting fromthe fact that the depletion layer extending toward the cathode side fromthe junction of p layer 3/n ⁻ drift layer 1 serving as a main junctionduring application of a reverse bias reaches p region 16.

Furthermore, peak values C₁ and C₂ of the impurity concentration (FIG.2) satisfy the following expression (3), which causes an increase incarrier concentration CC on the cathode side (FIG. 17) at the time whenthe diode is in the ON state.C ₂ >C ₁  (3)

As described above, the increased carrier concentration CC results in adecrease in V_(F) (FIG. 16), and accordingly, the trade-offcharacteristics between recovery loss E_(REC) and V_(F) (FIG. 15) isimproved.

In the case where the above-described relations (1) to (3) aresatisfied, a diode having particularly excellent characteristics can beachieved as compared to the diode in the comparative example (FIG. 26).

Second Embodiment

Referring to FIG. 18, a diode as a semiconductor device according to thepresent embodiment includes an n-type diffusion layer 17 (the fifthlayer), a trench structure 26 a, a diffusion layer 18, an interlayerdielectric film 19, insulation films 20 and 23, a silicide layer 21 a,and a barrier metal layer 22.

N-type diffusion layer 17 is located between a p layer 3 and an n⁻ driftlayer 1, and has an n-type. Trench structure 26 a has a trench extendingthrough p layer 3 and n-type diffusion layer 17 and also has a gateelectrode 14 filling the trench with a gate insulation film 12interposed therebetween. Gate electrode 14 is electrically insulatedfrom an anode electrode 5 by interlayer dielectric film 19. Silicidelayer 21 a serves to implement a low contact resistance with an Sidiffusion layer and is, for example, made of TiSi₂, CoSi or WSi. Barriermetal layer 22 is, for example, made of TiN. Interlayer dielectric film19 is made of a silicate glass film to which boron, phosphorus and thelike are added.

It is to be noted that since the configurations other than thosedescribed above are almost the same as the configuration according tothe above-described first embodiment, the same or correspondingcomponents are designated by the same reference characters, anddescription thereof will not be repeated.

The method for manufacturing the diode according to the presentembodiment will then be described.

First, a substrate which is a thick n⁻ drift layer 1 is prepared. Theimpurity concentration of n⁻ drift layer 1 is determined depending onthe breakdown voltage class and is set to be 1×10¹² to 1×10¹⁵ cm³ in 600to 6500V class, for example.

Then, p layer 3 is formed on the surface of this substrate with n-typediffusion layer 17 interposed therebetween. For example, p layer 3 has apeak concentration of 1×10¹⁶ to 1×10¹⁸ cm³ and a diffusion depth of 1 to4 μm. The peak concentration of the impurities in n-type diffusion layer17 is equal to or higher than the concentration of the impurities in n⁻drift layer 1 and is equal to or lower than the peak value of theimpurity concentration in p layer 3. Then, p⁺ diffusion layer 18 isformed on the surface of the substrate on which p layer 3 and n-typediffusion layer 17 are formed. P⁺ diffusion layer 18 has, for example, asurface concentration of 1×10¹⁸ to 1×10²⁰ cm⁻³ and a diffusion depth ofapproximately 0.5 μm. Trench structure 26 a and a cathode layer CLa arethen formed.

It is to be noted that p⁺ diffusion layer 18 may be formed after trenchstructure 26 a is formed.

The diode according to the present embodiment is used such that theelectric potential lower than that of a cathode electrode 4 is appliedto gate electrode 14 when the reverse voltage is applied to the diode.For the purpose of this, gate electrode 14 is electrically connected toanode electrode 5, for example. In addition, in the case where theelectric potential of cathode electrode 4 is rendered positive when areverse voltage is applied to the diode, gate electrode 14 may begrounded.

In this case, the simulation results show that a current density J_(A)at a cross point CP (FIG. 6) can be decreased. Accordingly, the currentdensity at cross point CP can be decreased below the current density atwhich the diode is overloaded. In this case, since the overloaded diodeexhibits a positive temperature coefficient at V_(F), the currentconcentration on the overloaded diode can be prevented.

Furthermore, the amount of hole injection from p layer 3 at the timewhen the device is turned on can be controlled by n-type diffusion layer17.

Furthermore, trench structure 26 a serves as a quasi-field platestructure, to facilitate extension of the depletion layer from thejunction between p layer 3 and n-type diffusion layer 17, with theresult that a maximum reverse voltage V_(RRM) can be maintained. Also,as trench structure 26 a is formed deeper than the interface between player 3 and n-type diffusion layer 17, maximum reverse voltage V_(RRM)can be more reliably maintained.

Furthermore, according to the diode in the comparative example (FIG.26), the trade-off characteristics between a recovery loss E_(REC) andV_(F) are controlled generally by adjusting the lifetime of carriers inn⁻ drift layer 1. In contrast, according to the present embodiment, theconcentration in p layer 3 is adjusted to control the trade-offcharacteristics and expand the controllable range of the trade-offcharacteristics, and thus, eliminating the lifetime adjusting process,to thereby allow simplification of the wafer process.

Referring to FIG. 19, a modification of the present embodiment will bedescribed. The diode according to the present modification includes ann-type diffusion layer 17, a trench structure 27, a p⁺ diffusion layer18, silicide layers 21 a and 21 b, and a barrier metal layer 22 b.Trench structure 27 includes a trench extending through a p layer 3 andn-type diffusion layer 17 and also includes a gate electrode 14 fillingthe trench with a gate insulation film 12 interposed therebetween. Inaddition, gate electrode 14 is electrically connected to an anodeelectrode 5 and has the same electric potential as that of anodeelectrode 5.

According to the present modification, gate electrode 14 is applied withthe same electric potential as that of anode electrode 5. Accordingly,when the voltage in the reverse direction is applied to the diode, theelectric potential lower than that of cathode electrode 4 can be appliedto gate electrode 14 without the need to control the electric potentialof gate electrode 14 from outside the diode. Consequently, the effectssimilar to those in the present embodiment can be achieved.

Third Embodiment

Referring to FIG. 20, the diode as a semiconductor device according tothe present embodiment includes an anode electrode 5 (the firstelectrode), a p layer 3 (the first layer), an n⁻ drift layer 1 (thesecond layer), an n layer 15 (the fourth layer), a cathode layer CLb(the third layer), a cathode electrode 24 (the second electrode), atrench structure 26 b, an interlayer dielectric film 19, insulationfilms 20 and 23, and a barrier metal layer 22.

P layer 3 is located on anode electrode 5 and has a p-type (the firstconductivity type). N⁻ drift layer 1 is located on p layer 3 and has aconductivity type different from the p-type, that is, an n-type (thesecond conductivity type).

Cathode layer CLb is located on n⁻ drift layer 1 with n layer 15interposed therebetween. Cathode layer CLb includes an n region 2 (thefirst portion) having an n-type and having a peak value of the impurityconcentration higher than the peak value of the impurity concentrationin n⁻ drift layer 1.

N layer 15 is located between n⁻ drift layer 1 and cathode layer CLb. Nlayer 15 having an n-type has a peak value of the impurity concentrationhigher than the peak value of the impurity concentration in n⁻ driftlayer 1, and also has a peak value of the impurity concentration lowerthan the peak value of the impurity concentration in n⁺ region 2.

Cathode electrode 24 is located on cathode layer CLb.

Trench structure 26 b includes a trench extending through n⁺ region 2and n layer 15 and also includes a gate electrode 14 filling the trenchwith gate insulation film 12 interposed therebetween. In other words,trench structure 26 b is located in n⁺ region 2 and n layer 15.

Gate electrode 14 and cathode electrode 24 are connected to the positiveterminal side and the negative electrode side, respectively, of avoltage source 30. Thus, trench structure 26 b is configured such thatthe electric potential that is positive with respect to the electricpotential of cathode electrode 24 may be applied.

It is to be noted that since the configurations other than thosedescribed above are almost the same as the configuration according tothe above-described first embodiment, the same or correspondingcomponents are designated by the same reference characters, anddescription thereof will not be repeated.

Furthermore, it may be possible to apply the structure having cathodelayer CLa in place of the above-described cathode layer CLb (FIG. 21) orthe structure without having n layer 15.

The simulations similar to those in the first embodiment were performedin order to examine the characteristics of the diode according to thepresent embodiment. The simulation results will be hereinafterdescribed.

Referring to FIG. 23, simulations were performed for a carrierconcentration CC in the ON state. The results show that a carrierconcentration CC3 of the diode (FIG. 20) in the example of the presentembodiment is higher than carrier concentration CC0 of the diode in thecomparative example (FIG. 26). In other words, it is found that thecarrier concentration near the cathode is increased in the ON state. Itis considered that this increase in carrier concentration causes adecrease in V_(F).

Referring to FIG. 24, simulations were performed for the characteristicsof a current density J_(A)−a voltage V_(AK). The figure shows a currentdensity J_(A) 3 in the case of the diode in the present embodiment (FIG.20) and a current density J_(A) 0 in the case of the diode in thecomparative example (FIG. 26). According to the present embodiment, itis found that the characteristic curve of current density J_(A)−voltageV_(AK) shifts in the direction in which voltage V_(AK) is decreased onthe horizontal axis on the graph, as compared to the case in thecomparative example. In other words, it is found that V_(F) can bedecreased.

Referring to FIG. 25, simulations were performed for the correlationbetween a depth y of trench structure 26 b and V_(F). Consequently, itis found that V_(F) can be further sufficiently decreased by settingtrench depth y to a dimension t2 or more. In other words, it is foundthat V_(F) can be further sufficiently decreased by providing trenchstructure 26 b so as to extend through n⁺ region 2 and n layer 15.

According to the present embodiment, when a positive bias is applied totrench structure 26 b located on the cathode side, an accumulation layeris formed on the sidewall of the trench, which causes an effect similarto that obtained in the case where n⁺ region 2 is expanded. Therefore,the electron injection from the cathode side can be facilitated at thetime when the device is turned on, and consequently, V_(F) can bedecreased.

Furthermore, V_(F) can be further sufficiently decreased by providingtrench structure 26 b so as to extend through n⁺ region 2 and n layer15. In addition, in the modification (FIG. 22), trench structure 26 bmay be provided so as to extend through n⁺ region 2.

Although the first and second conductivity types correspond to a p-typeand an n-type, respectively, in each of the above-described embodiments,the present invention is not limited thereto, but the first and secondconductivity types may correspond to an n-type and a p-type,respectively.

Although the diode has been described as a semiconductor device in eachof the above-described embodiments, the semiconductor device accordingto the present invention is not limited to a diode alone, but may be apower module including a diode. Such a power module may include, forexample, an IGBT.

Although the case where p layer 3, n⁻ drift layer 1, n layer 15, andcathode layer CLa are made of Si to which conductive impurities areadded has been described, similar effects can be obtained even when awide band gap material such as SiC or GaN is used in place of Si.

Furthermore, although the case where the semiconductor device of a highbreakdown voltage rated at 3300V class has been described as an example,the present invention can also be applied to those of other breakdownvoltage classes.

Although the present invention has been described and illustrated indetail, it is clearly understood that the same is by way of illustrationand example only and is not to be taken by way of limitation, the scopeof the present invention being interpreted by the terms of the appendedclaims.

What is claimed is:
 1. A semiconductor device comprising: a firstelectrode; a first layer located on said first electrode and having afirst conductivity type; a second layer located directly on said firstlayer and only having a second conductivity type different from saidfirst conductivity type; a third layer having a first portion, saidfirst portion having said second conductivity type and having a peakvalue of an impurity concentration higher than a peak value of animpurity concentration in said second layer; a second electrode locatedon said third layer; a fourth layer only having said second conductivitytype disposed between said second layer and said third layer such thatthe fourth layer is directly contacting both the second layer and thethird layer; and two trench structures located in said first portion andapplied with an electric potential which is positive with respect to anelectric potential of said second electrode, wherein said third layerincludes a second portion, which has a same thickness as the firstportion of the third layer and is flush and continuous with the firstportion of the third layer, having said first conductivity type, saidtwo trench structures are completely surrounded by said first portion inan area extending from a first surface of said third layer to a secondsurface of said third layer, the first portion occupying an entire areabetween the two trench structures within the third layer and the secondportion is disposed offset from the two trench structures without beingdirectly adjacent to any trench structures, said second surface of thethird layer, including a region of the first portion which is betweenthe two trench structures abuts and is in direct contact with saidsecond electrode, and said first surface, which includes both the firstportion and the second portion, opposes said second surface and is indirect contact with said fourth layer.
 2. The semiconductor device ofclaim 1, wherein said second portion extends from said first surface ofsaid third layer to said second surface of said third layer.
 3. Asemiconductor device comprising: a first electrode; a first layerlocated on said first electrode and having a first conductivity type; asecond layer located directly on said first layer and only having asecond conductivity type different from said first conductivity type; athird layer having a first portion, said first portion having saidsecond conductivity type and having a peak value of an impurityconcentration higher than a peak value of an impurity concentration insaid second layer; a second electrode located on said third layer; afourth layer only having said second conductivity type disposed betweensaid second layer and said third layer such that the fourth layer isdirectly contacting both the second layer and the third layer; and twotrench structures located in said first portion and applied with anelectric potential which is positive with respect to an electricpotential of said second electrode, wherein said third layer includes asecond portion, which has a same thickness as the first portion of thethird layer, having said first conductivity type, said two trenchstructures are completely surrounded by said first portion in an areaextending from a first surface of said third layer to a second surfaceof said third layer, the first portion occupying an entire area betweenthe two trench structures within the third layer and the second portionis disposed offset from the two trench structures without being directlyadjacent to any trench structures, said second surface abuts said secondelectrode, and said first surface opposes said second surface and is indirect contact with said fourth layer, wherein said fourth layer has apeak value of an impurity concentration higher than said peak value ofsaid impurity concentration in said second layer and lower than saidpeak value of said impurity concentration in said first portion.
 4. Thesemiconductor device of claim 3, wherein said two trench structuresextend through said fourth layer.